Wi8i G2


Wi8i G2
: Wafer Vision Inspection Handler



Wi8i G2 Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer range from 100mm (4”) to 300mm (12”).

Model Type Wi8 i G2
Wafer Input Type & Size Raw Wafer - 6" (150mm), 8" (200mm), 12" (300mm)
Framed Wafer - 6" (150mm), 8" (200mm), 12" (300mm)
Hoop Ring -4" (100mm), 6" (150mm), 8" (200mm)*
Camera Lens 1X 2X 5X
Accuracy 2.5  μm / pixel 1.25  μm / pixel 0.5  μm/ pixel
Field of View 12.8mm x 12.8mm 6.4mm x 6.4mm 2.5mm x 2.5mm
System Capability Offline Verifier
Optimize production yield. Once wafer inspection is completed, user can identify, review and reclassify inspection result with Offline Verifier.
Wafer Automated Loader-Unloader
Auto handling supports up to 300mm (12") raw wafer, hoop ring and framed wafer.

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